| 摘要 |
PROBLEM TO BE SOLVED: To provide a droplet discharge head having a nozzle plate excellent in liquid repellent property and wear resistance of the discharge side surface of nozzles, its manufacturing method, and a droplet discharge apparatus. SOLUTION: The head has a nozzle plate 3 having a plurality of nozzles 20 which discharge droplets, pressure generation chambers 5 which communicate with the nozzles 20 of the nozzle plate 3 and contain droplets, and pressure generation means which provide pressure variation to the pressure generation chambers 5 for causing the droplets to fly (means which have diaphragms 4 and discrete electrodes 11 disposed facing to the diaphragms 4 and change the diaphragms 4 by electrostatic force). A liquid repellent film 25 composed of a carbon nanotube film is formed at least in the peripheral portion of the discharge side surface of the nozzle 20. COPYRIGHT: (C)2007,JPO&INPIT
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