APPARATUS FOR ANALYZING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for analyzing an element with high sensitivity and high accuracy. SOLUTION: A plasma torch 2 has a conical plasma chamber 2d pointed toward the forward end. In addition, a cold coil 3 for applying high frequency is arranged around the plasma chamber 2d. A plasma 4 is generated in the plasma chamber by applying a high frequency (27.12 MHz) from the cold coil 3 while feeding Ar. COPYRIGHT: (C)2007,JPO&INPIT