| 摘要 |
PROBLEM TO BE SOLVED: To eliminate a contamination of a probe while preventing a sample surface from deteriorating, without removing any cantilever. SOLUTION: A scanning probe microscope is provided, which comprises: a sample measuring chamber; a probe cleaning chamber; and a blocking mechanism for blocking off between the above two chambers, and in which the cantilever can be moved between the two chambers. The probe cleaning chamber is equipped with an ultraviolet light irradiation mechanism and an ozone supplying mechanism, and the sample measuring chamber and the probe cleaning chamber are blocked off from each other when operating above two mechanisms. The cantilever cleans the probe by using ultraviolet light and ozone in the probe cleaning chamber. COPYRIGHT: (C)2007,JPO&INPIT
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