Active matrix panel inspection device, inspection method, and active matrix oled panel manufacturing method

摘要

An inspection method includes an array process of forming a TFT array on a substrate to fabricate an active matrix panel, an inspection process of carrying out performance inspection of the fabricated active matrix panel, and a cell process of mounting an OLED on the active matrix panel judged as non-defective in the inspection process. In the inspection process, a counter electrode is disposed in the vicinity of a plane, where an OLED connection electrode is exposed, of the active matrix panel fabricated in the array process so as to observe an electric current flowing on a pixel subject to measurement which constitutes the active matrix panel.