SPIN PROCESSOR OF SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a spin processor in which a first treating liquid and a second treating liquid can be separated/recovered and which is constituted so that each of the first and second liquids scattered from a substrate is not stuck again to the substrate. SOLUTION: The spin processor is provided with: a rotary table 11 which is arranged in an outer cup body 1 and rotary-driven by a control motor 17 in a state the substrate is held on the upper surface thereof; an inner cup body 21 which is arranged in the outer cup body and driven vertically by a vertical drive mechanism 27 between such a lowered position that the upper end of the inner cup body is lower than the upper surface of the rotary table and such an elevated position that the upper end thereof is higher than the substrate held on the rotary table; a first reflection plate 6 which is arranged in the inner peripheral part of the outer cup body and used for reflecting the second treating liquid scattered from the peripheral part of the substrate downward when the substrate is rotated and treated with the second treating liquid in a state the inner cup body is kept in the lowered position; and a second reflection plate 25 which is arranged in the inner peripheral part of the inner cup body and used for reflecting the first treating liquid scattered from the peripheral part of the substrate downward when the substrate is rotated and treated with the first treating liquid in a state the inner cup body is kept in the elevated position. COPYRIGHT: (C)2007,JPO&INPIT