| 摘要 |
The invention relates to a method for producing a zeroth-order or low-order phase delay element, in particular a phase delay element for wavelengths lambda<200 nm, the phase delay element being formed from a birefringent crystalline material. In this case, an anisotropic crystal plate connected via a first connecting layer to a first carrier plate is connected to a second carrier plate on the side averted from the first carrier plate by means of a second connecting layer. The two connecting layers are sequentially removed, and an immersion liquid is respectively applied to the exposed surfaces of the anisotropic crystal plate and a support plate is mounted in each case.
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