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发明名称
System mit nanoskaligen Leiter und Öffnung
摘要
申请公布号
DE60305138(T2)
申请公布日期
2007.02.22
申请号
DE2003605138T
申请日期
2003.11.06
申请人
AGILENT TECHNOLOGIES INC.
发明人
CHOPRA, NASREEN G.;BASILE, DAVID PAUL;GOLOVCHENKO, JENE A.
分类号
B82B3/00;B82B1/00;G01N27/12;H01L21/335;H01L23/532
主分类号
B82B3/00
代理机构
代理人
主权项
地址
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