Hard film for cutting tools, cutting tool coated with hard film, process for forming hard film, and target used to form hard film

摘要

A hard film for cutting tools which is composed of (Ti1-a-b-c-d' Ala' Crb, Sic, Bd)(C1-eNe) 0.5≤a≤0.8, 0.06≤b, 0≤c≤0.1, 0≤d≤0.1, 0≤c+d≤0.1, a+b+c+d < 1, 0.5≤e≤1 (where a, b, c, and d denote respectively the atomic ratios of Al, Cr, Si, and B, and e denotes the atomic ratio of N.)