| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photosensitive film containing an appropriate amount of an organic solvent in a photosensitive layer, having small surface tackiness, good laminating property and handleability, and excellent in conformability to a substrate; and also to provide a method for producing the photosensitive film, and a permanent pattern forming method using the photosensitive film. <P>SOLUTION: The photosensitive film comprises a support and the photosensitive layer thereon formed of a photosensitive composition comprising a binder, a polymerizable compound, a photopolymerization initiator, a heat crosslinking agent and the organic solvent, wherein the content of the organic solvent in the photosensitive layer is 0.01-3 mass%. The method for producing the photosensitive film and the permanent pattern forming method using the photosensitive film are also provided. The organic solvent is preferably two or more organic solvents different from each other in boiling point. <P>COPYRIGHT: (C)2007,JPO&INPIT |
