发明名称 METHOD AND APPARATUS FOR MANUFACTURING A PROBE CARD
摘要 <p>In a method of manufacturing a probe card, a plurality of probe modules, including a sacrificial substrate and probes on the sacrificial substrate, is prepared. The probe modules are mutually aligned to form a probe module assembly having the aligned probe modules and a desired size. The probe module assembly is then attached to a probe substrate. Thus, the probe card having a large size may be manufactured.</p>
申请公布号 WO2007021079(A1) 申请公布日期 2007.02.22
申请号 WO2006KR02906 申请日期 2006.07.24
申请人 PHICOM CORPORATION;KIM, KI-JOON;JO, YONG- HWI;OH, SUNG-YOUNG;HWANG, JUN-TAE 发明人 KIM, KI-JOON;JO, YONG- HWI;OH, SUNG-YOUNG;HWANG, JUN-TAE
分类号 H01L21/66 主分类号 H01L21/66
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