| 摘要 |
PROBLEM TO BE SOLVED: To provide a cooling structure of a laser generator which employs an air cooling system with reduced installation space and sufficient exoergic measure. SOLUTION: A surface plate 11 with a duct D disposed in the center is used, optical components for laser beam formation are disposed in its both sides, and it is made to be an airtight structure exhausting generated heat of optical components from the duct D. In the duct, a heat sink H is disposed in the installed position of the optical component T and coupled to the optical component T with the airtight condition being left intact. A Peltier element is diposed directly under the optical component T to perform individual temperature control. Moreover, in the surface plate 11, a plurality of ducts D is formed with ribs to realize weight reduction and high stiffness. COPYRIGHT: (C)2007,JPO&INPIT |
