| 摘要 |
PROBLEM TO BE SOLVED: To provide a driving unit and a driving method with which rocking angular amplitude at a mirror part is made large without making the peak value of an applied driving voltage high. SOLUTION: A voltage is applied separately in a period in which a periodic voltage applied as the driving voltage goes from a maximum point to a minimum point. By reducing the voltage between electrodes during this period, electrostatic attraction force is reduced in the vicinity of a point where the rocking angle becomes nearly zero, the resistance to the rocking motion is reduced, thus the rocking angle of the mirror part becomes large. The rocking angle is made large without increasing the maximum value of the periodic voltage. COPYRIGHT: (C)2007,JPO&INPIT
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