| 摘要 |
<p>Machining plants has two transfer devices (27) with identical guide ways (15, 16) running along the data transferring units (17, 18), which are provided independent from each other. Each of the data transferring units has a transfer chamber (21,22) for retaining the respective substrate layer and has blocked connection opening which can be connected at sealing transfer opening (8 to14).</p> |
