,申请号JP20020138042-传众专利搜索

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发明名称
摘要
申请公布号	JP3883470(B2)	申请公布日期	2007.02.21
申请号	JP20020138042	申请日期	2002.05.14
申请人		发明人
分类号	H01L21/302;H01L21/3065;H01L21/027;H01L21/311;H01L21/318;H01L21/3213	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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