| 发明名称 |
APPARATUS, SYSTEM AND METHOD TO VARY DIMENSIONS OF A SUBSTRATE DURING NANO-SCALE MANUFACTURING |
| 摘要 |
<p>A system to vary dimensions of a template comprising a frame (192) having a central aperture (194), and an actuator sub-assembly (190) including a plurality of lever sub-assemblies (196) mounted to the frame (192); the actuator sub assemblies are operable to apply a force such as to provide aperture (194) with appropriate dimensions to receive template (26).</p> |
| 申请公布号 |
EP1754108(A2) |
申请公布日期 |
2007.02.21 |
| 申请号 |
EP20050768764 |
申请日期 |
2005.06.01 |
| 申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
CHERALA, ANSHUMAN;CHOI, BYUNG-JIN;NIMMAKAYALA, PAWAN K.;MEISSL, MARIO J.;SREENIVASAN, SIDLGATA V. |
| 分类号 |
G03B27/58;B29C43/02;B81C99/00;G03F7/00 |
主分类号 |
G03B27/58 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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