Apparatus for gas flow sputtering,申请号EP20000103783-传众专利搜索

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发明名称	Apparatus for gas flow sputtering
摘要
申请公布号	EP1031639(B1)	申请公布日期	2007.02.21
申请号	EP20000103783	申请日期	2000.02.23
申请人	ISTITUTO NAZIONALE PER LA FISICA DELLA MATERIA	发明人	MILANI, PAOLO;PISERI, PAOLO GIUSEPPE CARLO;BARBORINI, EMANUELE
分类号	C23C14/34;B22F9/14;H01J37/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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