发明名称 SCANNING FORCE MICROSCOPE PROBE CANTILEVER WITH REFLECTIVE STRUCTURE
摘要 <p>A scanning force microscope probe cantilever having a reflective structure. In one embodiment, the described scanning force microscope probe cantilever includes a reflective structure on the cantilever. In one embodiment, light is directed to the reflective structure on the cantilever in a direction having a directional component from a fixed end to a free end of the cantilever. In one embodiment, light is reflected from the reflective structure in a direction having a directional component from the free end to a fixed end of the cantilever.</p>
申请公布号 EP1247063(B1) 申请公布日期 2007.02.21
申请号 EP20000988289 申请日期 2000.12.21
申请人 SUSS MICROTEC TEST SYSTEMS GMBH 发明人 THOMSON, DOUGLAS, J.;LADA, CHRISTOPHER, O.
分类号 G01B5/28;G01B7/34;G01Q20/02;G01R1/06;G01R31/302;H01L21/66 主分类号 G01B5/28
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