发明名称 |
SCANNING FORCE MICROSCOPE PROBE CANTILEVER WITH REFLECTIVE STRUCTURE |
摘要 |
<p>A scanning force microscope probe cantilever having a reflective structure. In one embodiment, the described scanning force microscope probe cantilever includes a reflective structure on the cantilever. In one embodiment, light is directed to the reflective structure on the cantilever in a direction having a directional component from a fixed end to a free end of the cantilever. In one embodiment, light is reflected from the reflective structure in a direction having a directional component from the free end to a fixed end of the cantilever.</p> |
申请公布号 |
EP1247063(B1) |
申请公布日期 |
2007.02.21 |
申请号 |
EP20000988289 |
申请日期 |
2000.12.21 |
申请人 |
SUSS MICROTEC TEST SYSTEMS GMBH |
发明人 |
THOMSON, DOUGLAS, J.;LADA, CHRISTOPHER, O. |
分类号 |
G01B5/28;G01B7/34;G01Q20/02;G01R1/06;G01R31/302;H01L21/66 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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