PIEZOELECTRIC SINGLE CRYSTAL ELEMENT AND PROCESS FOR FABRICATING THE SAME

摘要

To provide a piezoelectric single-crystal device which can stably attain an electromechanical coupling factor k 31 of 60% or more in the lateral vibration mode and a method of manufacturing the same. Specifically, the piezoelectric single-crystal device has the polarization direction 3 in the [110] axis of a pseudocubic system and has the direction normal to an end face 10c of the piezoelectric device within the solid angle range of the [001] axis ± 35° including the [001] axis approximately orthogonal to the polarization direction 3. The electromechanical coupling factor k 31 in the direction orthogonal to the polarization direction 3, in the so-called lateral vibration mode, is 60% or more.