发明名称 Measuring apparatus and method for thin board
摘要 A measuring apparatus including a fixed stator, a rotor to rotate in the state of being disposed outside the center of rotation of the stator, a retaining mechanism for retaining a thin board on the rotor, and a measuring section to measure physical properties of the thin board. This construction makes it possible to avoid wind generated by rotation of the rotor in the vicinity of the thin board, and to suppress vibration of the thin board. Further, since a portion exposed to the thin board can be minimized, safe measurement can be implemented.
申请公布号 US7178393(B2) 申请公布日期 2007.02.20
申请号 US20040973349 申请日期 2004.10.27
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 KUBO KEISHI;DOI MASATERU;HINO NAOFUMI;MOCHIZUKI HIROYUKI;SATAKE SYOJIRO
分类号 G01B11/06;G01L5/04;H01L21/66 主分类号 G01B11/06
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