发明名称 Electronic component having a resonator and fabrication process
摘要 An electronic component ( 1 ) includes a substrate ( 2 ) and at least two piezoelectric resonators ( 3, 4 ) each having an active element ( 6, 9 ), a lower electrode ( 5, 8 ) and an upper electrode ( 7, 10 ). The lower electrode ( 5 ) of the first resonator ( 3 ) is made of a material that is different from that of the lower electrode ( 8 ) of the second resonator ( 4 ) such that the resonators exhibit different resonance frequencies.
申请公布号 US7180224(B2) 申请公布日期 2007.02.20
申请号 US20040815472 申请日期 2004.04.01
申请人 STMICROELECTRONICS S.A. 发明人 BOUCHE GUILLAUME;SMEARS NICK;ANCEY PASCAL;CARUYER GREGORY
分类号 H01L41/08;H01L27/20;H03H9/15;H03H9/58 主分类号 H01L41/08
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