发明名称 Method of forming thin-film transistor devices with electro-static discharge protection
摘要 A silicon layer is formed on a substrate, and then the silicon layer is patterned, and source regions, drain regions and connectors, all with the same conductivity, are formed. The source regions are connected with the drain regions electrically by the connectors, and short circuits are thus constructed. Then, subsequent procedures of thin film transistor fabrication are performed in turn. Finally, when the source/drain metal is patterned to form data lines, the connectors are cut off by etching as the source/drain metal is etched.
申请公布号 US7180090(B2) 申请公布日期 2007.02.20
申请号 US20050203346 申请日期 2005.08.12
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 CHEN CHEN-MING;CHU FANG-TSUN;CHANG JIUN-JYE
分类号 H01L29/04;H01L21/00;H01L21/77;H01L21/84;H01L23/60;H01L27/01;H01L27/02;H01L27/12;H01L29/10;H01L29/78 主分类号 H01L29/04
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