A LIQUID MATERIAL COATING APPARATUS AND A METHOD FOR PREVENTING AN ORGANIC CONTAMINATION IN A LIQUID MATERIAL COATING PROCESS,申请号KR20000062486-传众专利搜索

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发明名称	A LIQUID MATERIAL COATING APPARATUS AND A METHOD FOR PREVENTING AN ORGANIC CONTAMINATION IN A LIQUID MATERIAL COATING PROCESS
摘要
申请公布号	KR100684246(B1)	申请公布日期	2007.02.20
申请号	KR20000062486	申请日期	2000.10.24
申请人		发明人
分类号	G03F7/16;H01L21/027;B05C11/08;B05D1/40;B65G49/00;H01L21/31;H01L21/677;H01L21/68	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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