发明名称 Probe card and method for manufacturing probe card
摘要 A probe card that is manufactured inexpensively. The probe card includes a base plate, a flexible substrate, and a contact probe. The contact probe is a flexible substrate formed from polyimide resin. The contact probe has a plurality of parallel wires. Each wire has a distal end that functions as a contact. The contact probe is produced by cutting a general purpose substrate having a plurality of parallel wires formed at a predetermined pitch. The number of the parallel wires is equal to the number of pads of an LSI chip.
申请公布号 US7180312(B2) 申请公布日期 2007.02.20
申请号 US20030395208 申请日期 2003.03.25
申请人 FUJITSU LIMITED 发明人 ARISAKA YOSHIKAZU;ITAGAKI KUNIHIRO;ISHIHARA SHIGENOBU;GIGA TOMOHIRO;KIKUCHI NAOYOSHI
分类号 G01R31/02;G01R31/26;G01R1/073;G01R3/00;G01R31/28;H01L21/66 主分类号 G01R31/02
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