发明名称 |
Probe card and method for manufacturing probe card |
摘要 |
A probe card that is manufactured inexpensively. The probe card includes a base plate, a flexible substrate, and a contact probe. The contact probe is a flexible substrate formed from polyimide resin. The contact probe has a plurality of parallel wires. Each wire has a distal end that functions as a contact. The contact probe is produced by cutting a general purpose substrate having a plurality of parallel wires formed at a predetermined pitch. The number of the parallel wires is equal to the number of pads of an LSI chip. |
申请公布号 |
US7180312(B2) |
申请公布日期 |
2007.02.20 |
申请号 |
US20030395208 |
申请日期 |
2003.03.25 |
申请人 |
FUJITSU LIMITED |
发明人 |
ARISAKA YOSHIKAZU;ITAGAKI KUNIHIRO;ISHIHARA SHIGENOBU;GIGA TOMOHIRO;KIKUCHI NAOYOSHI |
分类号 |
G01R31/02;G01R31/26;G01R1/073;G01R3/00;G01R31/28;H01L21/66 |
主分类号 |
G01R31/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|