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发明名称
包含超晶格之微机电系统(MEMS)元件
摘要
一种微机电系统(MEMS)元件,其可包含一底材以及由该底材所支撑的至少一可移动部件。该至少一可移动部件可包括含有复数个堆叠层群组之一超晶格,且该超晶格的每一层群组包含有界定一基底半导体部份之复数个堆叠之基底半导体单层,以及被限定在相邻于基底半导体部份之一晶体晶格内的至少一非半导体单层。
申请公布号
TW200707650
申请公布日期
2007.02.16
申请号
TW095119421
申请日期
2006.06.01
申请人
R. J. 米尔斯公司
发明人
查理A 布兰查德
分类号
H01L21/8238(2006.01);H01L29/10(2006.01);H01L29/15(2006.01)
主分类号
H01L21/8238(2006.01)
代理机构
代理人
陈慧玲
主权项
地址
美国
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