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发明名称
Method for manufacturing the semiconductor device
摘要
申请公布号
KR100684450(B1)
申请公布日期
2007.02.16
申请号
KR20040118473
申请日期
2004.12.31
申请人
发明人
分类号
H01L21/3065;H01L21/8247
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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