发明名称 SUBSTRATE FILM FOR DICING
摘要 PROBLEM TO BE SOLVED: To provide a substrate film for dicing which is excellent in an antistatic property and makes it possible to quickly and easily recover a used dicing film to a rack. SOLUTION: The substrate film for dicing includes (1) a styrene based elastomer resin composition (SE resin composition) composed of (i) 100 to 20 wt.% of styrene based elastomer resin (SE resin A) whose glass transition temperature is 40 to 60°C and styrene ratio is 0 to 90 wt.%, and (ii) 0 to 80 wt.% of styrene based elastomer resin (SE resin B) whose glass transition temperature is 30°C or lower and styrene ratio is 7 to 80 wt.%; and (2) 10 to 30 pts.wt. of an antistatic agent to 100 pts.wt. of the styrene based elastomer resin composition. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007043070(A) 申请公布日期 2007.02.15
申请号 JP20060066323 申请日期 2006.03.10
申请人 GUNZE LTD 发明人 YOKOI MASAYUKI;KURIO HIROKI
分类号 H01L21/301;C08L25/10 主分类号 H01L21/301
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