发明名称 |
APPARATUS AND METHOD FOR DEPOSITING FUNCTIONAL BLOCKS |
摘要 |
A guiding feature used to assist deposition of a functional block into a recessed region formed in a substrate. A template is used to create the guiding feature on a substrate. The template comprises a first feature configured to create a corresponding recessed region in a substrate and a second feature configured to form a guiding line on the substrate. The guiding line is continuous for a section of the substrate and located proximate to the recessed region. The guiding line configured to guide a functional block toward the recessed region during a fluidic self-assembly deposition process. The substrate can include an array, divided into rows and columns, of the recessed regions to receive a plurality of functional blocks and the template includes more than one of the first features configured to create such array of recessed regions in the substrate. |
申请公布号 |
WO2007019067(A1) |
申请公布日期 |
2007.02.15 |
申请号 |
WO2006US29183 |
申请日期 |
2006.07.26 |
申请人 |
ALIEN TECHNOLOGY CORPORATION;SCHATZ, KENNETH, D. |
发明人 |
SCHATZ, KENNETH, D. |
分类号 |
H01L21/68;G06K19/077;H01L21/58;H01L21/98 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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