| 摘要 |
<P>PROBLEM TO BE SOLVED: To exclude influences of disturbance due to a use power supply member without causing a moving stage to increase its size. <P>SOLUTION: A stage device has a first stage which holds an object W by a holder WTB and moves, and a second stage which can move in a moving direction of the first stage. The first stage has a moving part 70 which can move the object W in a direction substantially perpendicular to the surface of the object W through an opening 71 formed in the holder WTB, and the second stage has a driving mechanism 88 for driving the moving part 70. <P>COPYRIGHT: (C)2007,JPO&INPIT |
