REDUCED-PRESSURE DRYING METHOD, FUNCTIONAL FILM MANUFACTURING METHOD, ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD THEREOF, LIQUID CRYSTAL DISPLAY DEVICE, ORGANIC EL DISPLAY DEVICE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a reduced-pressure drying method for optimizing an evaporation speed of an applied liquid solvent corresponding to the type of a liquid material in a drying process, and for executing the reduced-pressure drying in a state that the distribution of vapor pressure of the solvent is almost uniform in the plane where the solvent is applied, a functional film manufacturing method, and electro-optical device manufacturing method using the reduced-pressure drying method, an electro-optical device, a liquid crystal display device, an organic EL display device, and electronic equipment.

SOLUTION: The reduced-pressure drying method includes a step for reducing the pressure to prescribed operation pressure Ps with a pressure reduction means, while making first/second chambers communicate with each other in a state of storing a base material applied with the liquid material in the first chamber; a step for leaving the first chamber as it is until pressure inside the first chamber reaches prescribed pressure by the evaporation of the solvent, after sealing the first chamber at the stage of reaching the prescribed operation pressure Ps; a step for making the first chamber, whose internal pressure reaches the prescribed pressure, communicate with the second chamber; and a step for discharging the vapor of the solvent diffused in the first/second chambers with the pressure reduction means.

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