| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device in which, when a testpiece is irradiated with an electron beam and scanned and a reflecting electron which increases corresponding with a mass is detected and amplified to form a reflecting electron image, conditions before a change of magnification and after a change of magnification of irradiating and scanning a testpiece by an electron beam is set at almost the same and a reflecting electron image having an adequate shade can be formed even if a magnification is changed, and provide an adjustment method of an irradiating beam size of the inspection device. SOLUTION: An inspection device in which a testpiece is irradiated with an electron beam and scanned and a reflecting electron which increases corresponding to a mass will be detected and amplified to form a reflecting electron image is provided with an adjustment means to adjust a spot size of the electron beam so that a condition before a change of magnification can remain almost same with the condition after a change of magnification is instructed, and a means to irradiate and scan a testpiece corresponding to a magnification instructed and changed by the electron beam after adjustment. COPYRIGHT: (C)2007,JPO&INPIT
|
