| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator in which a degree of freedom is provided to a wiring layout of an electrode, thereby miniaturizing a head, a liquid droplet jet head, a liquid droplet jet device, a method for manufacturing the electrostatic actuator, a method for manufacturing the liquid droplet jet device, and a method for manufacturing the liquid droplet jet device. SOLUTION: This electrostatic actuator comprises a first substrate 3 having a diaphragm 30 and a second substrate 2 in which an electrode groove 20 is formed thereon and a discrete electrode 22 is provided to the electrode groove 20 with the diaphragm 30 and a gap therebetween, and the electrostatic actuator is so constituted that the first substrate 3 and the second substrate 2 are anodically bonded to each other. An equal potential contact 25 which is adapted to electrically connect the discrete electrode 22 formed on the second substrate 2 to the first substrate 3 when the anodic bonding of the first and second substrates 3, 2 is carried out, is provided to a discrete electrode lead section 23 formed to be continuous to each discrete electrode 22 on the first substrate 3 or the second substrate 2. COPYRIGHT: (C)2007,JPO&INPIT
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