| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for precision processing capable of highly accurately controlling both thickness and flatness of a target to be ground by conducting feedback control when controlling a travel amount of a moving part constituting a precision processing apparatus and a posture of a posture controller throughout steps from rough grinding to fine precision grinding. SOLUTION: A second base 3 for supporting a rotator 6b for rotating a grinding stone b is equipped with a feed screw mechanism 4 and an actuator 5 so that grinding is carried out while a travel of the second base 3 is appropriately controlled during steps from rough grinding to ultraprecision grinding. The posture controller 7 is provided between a rotator 6a for rotating the target (a) to be ground and a first base 2. The precision processing apparatus measures the thickness and flatness of the target (a) by optical probes 91 and 92, sends the measurement results to a computer 94, and sends a feedback instruction to the posture controller 7 to eliminate deviation between a target value and the measured value for controlling the posture. COPYRIGHT: (C)2007,JPO&INPIT
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