| 摘要 |
An inert gas purge station for a pod is provided to prevent oxidation on a surface of a semiconductor material by filling the pod with inert gas. An inert gas purge station for a pod includes a housing, a plurality of stages formed in the housing, an inert gas supply unit for supplying inert gas to a pod, a clamp(60) for fixing the pod to each of the stages, and a clean air supply unit for supplying air to operate the clamp. Each of the stages includes a sensor(51) for sensing a loading state of the pod, a plurality of registration pins(53) for determining a loading position of the pod, an exhaust port(55) for sucking the air from the pod, and an inert gas supply port(57) for supplying the insert gas to the pod.
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