| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent exposure a light, which has transmitted through a transparent glass substrate coated with a photosensitive substance and has propagated downward, from being reflected to return to a glass substrate. <P>SOLUTION: The exposure device is equipped with: a stage 1 which mounts on its face 1a a color filter substrate 7 coated with a photosensitive substance and which has an opening 9 penetrating in a vertical direction at the position corresponding to the preliminarily determined exposure region on the color filter substrate 7; and an exposure optical system 2 which can relatively move with respect to the stage 1 in a direction parallel to the upper face 1a of the stage 1 and which irradiates the exposure region of the color filter substrate 7 with exposure light to form a predetermined exposure pattern. A reflection mirror 5 is disposed below the opening 9 of the stage 1 and on the optical path of the exposure optical system 2 so as to reflect the light transmitting the color filter substrate 7 and propagating downward to a direction not toward the color filter substrate 7. <P>COPYRIGHT: (C)2007,JPO&INPIT |
