DEVICE AND METHOD FOR CORRECTING DEFECT OF PATTERNED SUBSTRATE, AND METHOD FOR MANUFACTURING PATTERNED SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a defect correction device and a defect correction method capable of reliably correcting defects, and also to provide a method for manufacturing patterned substrate by using the method.

SOLUTION: This device for correcting defects on a patterned substrate 6 is provided with: a mask film 5 oppositely disposed on the substrate 6; a laser beam source which emits a laser beam for disposing an opening part on the mask film 5; and a correction means of correcting the defect on the substrate 6 via the opening part disposed on the mask film 5, wherein a correction part corrected by the correction means is pressed by an elastic body 18.

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