发明名称 SEMICONDUCTOR WAFER AND METHOD OF FABRICATING THE SAME
摘要 Disclosed is a semiconductor wafer and method of fabricating the same. The semiconductor wafer is comprised of a semiconductor layer formed on an insulation layer on a base substrate. The semiconductor layer includes a surface region organized in a first crystallographic orientation, and another surface region organized in a second crystallographic orientation. The performance of a semiconductor device with unit elements that use charges, which are activated in high mobility to the crystallographic orientation, as carriers is enhanced. The semiconductor wafer is completed by forming the semiconductor layer with the second crystallographic orientation on the plane of the first crystallographic orientation, growing an epitaxial layer, forming the insulation layer on the epitaxial layer, and then bonding the insulation layer to the base substrate.
申请公布号 US2007034950(A1) 申请公布日期 2007.02.15
申请号 US20060463137 申请日期 2006.08.08
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK YOUNG-SOO;CHO KYOO-CHUL;HAN SHIN-HYEOK;KANG TAE-SOO
分类号 H01L27/12;H01L27/01;H01L31/0392 主分类号 H01L27/12
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