| 摘要 |
An apparatus for coating a nanostructure of conductive carbon is provided to produce a coating in which the hardness and the electrical resistivity are controlled to a predetermined value and the residual stress is reduced more than 50%. The apparatus for coating a nanostructure of conductive carbon includes a vacuum chamber(110), a material to be coated, a power supply(190), a first and second magnetron source(160,170) equipped with a first and second target(140,150) which contains a target material for synthesizing a conductive nano-structural carbon layer on the material to be coated, respectively and a power control part(200). The power control part(200) controls the power supply(190) to supply the first and second target(140,150) with direct current bias voltage(-) so that the target material can be sputtered. The sputtered target material is synthesized on the material to be coated which is rotated by the rotatable zig(180) to form a conductive nano-structural carbon layer. |
