| 摘要 |
<p>The invention relates to a cathodic arc evaporation device comprising an evaporation chamber (2), at least one cathode (7) and at least one anode (13, 13A). The cathode (7) comprises a body of a material which is evaporated by the arc on an evaporation surface (71). According to the invention, an insert (100, 200) is disposed on the aforementioned evaporation surface (71), said insert comprising an electrically conductive part (101, 201) which projects out in relation to the evaporation surface (71), in order to establish a point for the easy formation of a spark. The inventive device also comprises a gas inlet (102, 202) which is aligned with the above-mentioned electrically-conductive part (101, 201) and which is used to inject a gas into the chamber (2) at said electrically-conductive part, in order to facilitate the formation of a spark. The invention also relates to an arc ignition method.</p> |
