<p>A measurement system has a modulated laser source that illuminates a target within the measurement system. The modulated laser source has a first coherence length in an unmodulated state, and a second coherence length in a modulated state that is shorter than the first coherence length. The measurement system includes a detector that receives a deflected signal from the target and provides a detected signal having a signal component and a drift component, wherein the drift component is lower in the modulated state than in the unmodulated state of the modulated laser source.</p>
申请公布号
WO2007018833(A2)
申请公布日期
2007.02.15
申请号
WO2006US25805
申请日期
2006.06.30
申请人
AGILENT TECHNOLOGIES, INC.
发明人
VANWIGGEREN, GREGORY, D.;BANEY, DOUGLAS, M.;CORZINE, SCOTT, W.