发明名称 |
APPARATUS FOR ASSISTING SELECTION OF MEASURING POSITION |
摘要 |
<p>An apparatus for assisting selection of measuring positions, by which measurement and inspection required for producing a semiconductor device can be carried out efficiently. The apparatus for assisting selection of measuring positions has a selector for selecting or extracting measuring points that are measuring positions measured when the workpiece (e.g. wafer) of a semiconductor device is produced or inspected.</p> |
申请公布号 |
WO2007017942(A1) |
申请公布日期 |
2007.02.15 |
申请号 |
WO2005JP14669 |
申请日期 |
2005.08.10 |
申请人 |
FAB SOLUTIONS, INC;YAMADA, KEIZO |
发明人 |
YAMADA, KEIZO |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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