Verfahren und Apparat für die Herstellung von dünnen Schichten

摘要

To provide a process for forming a thin film which enables automatically forming thin films having constant optical properties in a great amount with stability and excellent reproducibility and to provide an apparatus therefor. A material for vapor deposition (4) is vaporized by an electron gun (3) and an antireflection film is formed by vapor deposition on lenses (2a) held in a coat dome (2). The electric power applied to the electron gun (3) is control in a manner such that the transmitted or reflected amount of light measured by an optical film thickness meter (10) continuously during the film formation is close to or the same as a reference amount of light stored in a means for storing data of reference amounts of light which stores theoretically obtained reference amounts of light.