| 摘要 |
A two-axis micro scanner is provided to perform high-frequency horizontal driving by using a vertical comb electrode structure executing a resonant motion and to perform low-frequency vertical driving by using a piezo-electric actuator and a cantilever executing a non-resonant motion. A two-axis micro scanner(20) is composed of a frame(37); a horizontal driving unit comprising a micro mirror(25), plural vertical driving comb electrodes(27) formed in a line along both sides of the micro mirror, and plural vertical fixed comb electrodes(22) formed together with the driving comb electrodes in turn; and a vertical driving unit having plural cantilevers(31a~31d) extended from the frame and connected to both ends of the horizontal driving unit to support the horizontal driving unit and plural piezo-electric actuators(30a~30d) installed on the upsides of each cantilever. The cantilever is vertically bent according to the contraction and expansion of the piezo-electric actuator.
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