DIAMOND ELECTRON SOURCE OF CARBON TERMINATION STRUCTURE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a diamond electron source having stable and excellent electron emission characteristics that can be utilized for a cold cathode surface structure capable of low-voltage operation and its manufacturing method.

SOLUTION: The electron emission source has a structure constructed of an electrode and a diamond film and emits electrons and electron beams from the diamond film when a voltage is impressed on the electrode. The diamond film is made of a diamond having a carbon termination structure in this electron source having the carbon termination structure. Its manufacturing method is also provided.

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