发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
A semiconductor device and its manufacturing method are provided to increase operation speed by forming a channel having a wide width. A semiconductor substrate has a base and protruded portions that are extended to a first direction on the base and separated from each other to a second direction substantially perpendicular with the first direction. A first dielectric(300) is formed on sides of the protruded portions. A first conductive pattern(400) is formed on the first dielectric. A first impurity region(111) is formed on an upper portion of the base. An upper of the respective protruded portions are partially eliminated to form convex portions(121) on a lower of the respective protruded portions. A second impurity region is formed on an upper portion of the respective convex portions.
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申请公布号 |
KR100685659(B1) |
申请公布日期 |
2007.02.15 |
申请号 |
KR20060008313 |
申请日期 |
2006.01.26 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
RHIE, HYOUNG SEUB |
分类号 |
H01L21/336 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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