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发明名称
DIFFUSION FURNACE
摘要
申请公布号
KR20070019348(A)
申请公布日期
2007.02.15
申请号
KR20050074238
申请日期
2005.08.12
申请人
发明人
分类号
H01L21/22
主分类号
H01L21/22
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