| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a mask for sequential lateral solidification preventing the deformation of patterns due to laser beams, and to provide its manufacturing method. <P>SOLUTION: A mask for sequential lateral solidification has a transparent substrate and a heat-resistant oxide film pattern that is formed on the transparent substrate to intercept laser beams. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
