Actuator device, liquid-jet head liquid-jet apparatus

摘要

An actuator device including vibration plates formed on one side of a substrate; and piezoelectric elements mounted through the vibration plates and each including a lower electrode, a piezoelectric layer, and an upper electrode, wherein a ratio d₃₁/S₁₁^E of a piezoelectric constant d₃₁ of the piezoelectric layer to an elastic compliance S₁₁^E of the piezoelectric layer is greater than 5 C/m², and the elastic compliance S₁₁^E of each vibration plate is greater than 2x10^-8 m²/N.