Amorphous high-k thin film and manufacturing method thereof,申请号KR20050012442-传众专利搜索

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发明名称	Amorphous high-k thin film and manufacturing method thereof
摘要
申请公布号	KR100682931(B1)	申请公布日期	2007.02.15
申请号	KR20050012442	申请日期	2005.02.15
申请人		发明人
分类号	H01L27/04;H01L21/324;H01L27/108	主分类号	H01L27/04
代理机构		代理人
主权项
地址

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