| 发明名称 |
SENSOR ZUM BERÜHRUNGSLOSEN MESSEN EINER TEMPERATUR |
| 摘要 |
The temperature device (10, 20) has a sensor on a base plate (31) with contacts (32, 33, 34) that contact the sensor. The sensor has a chip body (2, 12) with a recess that is covered by a membrane (13) and is manufactured via reactive ionisation. The sensor may have a heat-sensitive region (14) together with a row switch made from two thermo-electric materials |
| 申请公布号 |
AT352771(T) |
申请公布日期 |
2007.02.15 |
| 申请号 |
AT20020019184T |
申请日期 |
2002.09.02 |
| 申请人 |
PERKINELMER OPTOELECTRONICS GMBH |
发明人 |
SCHIEFERDECKER, JOERG;HAUSNER, MARTIN;LENEKE, WILHELM;SIMON, MARION |
| 分类号 |
G01J1/02;G01J5/02;G01J5/10;G01J5/12;G01J5/14;G01J5/20;H01L35/14;H01L35/22;H01L35/32;H01L35/34;H01L37/02;(IPC1-7):G01J5/10 |
主分类号 |
G01J1/02 |
| 代理机构 |
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代理人 |
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