发明名称 SEMICONDUCTOR DEVICE, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, MANUFACTURING METHOD PROGRAM OF SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR MANUFACTURING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device having a fine structure capable of compensating dispersion in a manufacturing stage by using a test result by a tester, its manufacturing method, its manufacturing method program, and a semiconductor manufacturing apparatus. <P>SOLUTION: In the tester 1, a test sound wave is input, and an output voltage from a device in response to input of the test sound wave is detected. A bonder 60 receives a test result by the tester 1, executes classification of the device, and executes bonding and adjust to acquire an amplification factor of an amplifier corresponding to a classified group. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007040704(A) 申请公布日期 2007.02.15
申请号 JP20050221691 申请日期 2005.07.29
申请人 TOKYO ELECTRON LTD 发明人 IKEUCHI NAOKI;YAKABE MASAMI
分类号 G01P21/00;B81B3/00;G01L1/18;G01P21/02;H01L21/66;H04R19/04;H04R31/00 主分类号 G01P21/00
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